Silicon Nitride Plate/Sheet/Disc
- Custom and standard options available.
- Fast lead times guaranteed.
- High performance at a competitive price.
Silicon nitride plates/sheets/discs offer high hardness (1600 HV), fracture toughness, low density (~3.2 g/cm³), and stability above 1200°C. With excellent thermal shock resistance, precision-machined surfaces, dielectric properties, and plasma erosion resistance, they are ideal for semiconductor wafer chucks, fuel cell components, and precision engineering.NexusX Advanced Materials, as a premier manufacturer and supplier of high-quality Silicon Nitride Plate/Sheet/Disc products, focuses on producing high-precision aluminum nitride silicon structural compenents through advanced technologies for diverse application fields.
Or email us at [email protected]
Silicon Nitride Plate/Sheet/Disc Data Sheet
| Purity: | ≥99% |
| Color: | Black |
| Chemical Formula: | Si3N4 |
| Material Grades: | HMSN1000, HMSN2000, HMSN3000, HMSN4000 |
| Density: | 3.20 g/cm3 |
| Dimension: | customized |
| Shape: | Rectangular, square, round |
Silicon Nitride Plate/Sheet/Disc Description
Silicon nitride plates/sheets/discs are manufactured from high-purity raw materials using advanced sintering techniques, offering outstanding comprehensive performance. With a density of 3.2-3.3 g/cm³, Vickers hardness of 1400-1600, and flexural strength exceeding 800 MPa, they combine excellent fracture toughness. These components demonstrate exceptional performance in high-temperature environments, with a maximum continuous service temperature of 1200°C, low thermal expansion coefficient of 3.2×10⁻⁶/K, and thermal conductivity of 15-30 W/(m·K), providing remarkable thermal shock resistance. Precision grinding delivers surface flatness within ±0.005 mm and surface roughness of Ra≤0.4 μm, available in multiple standard specifications and custom dimensions. The material exhibits superior corrosion resistance against most acids, alkalis, and molten metals, along with excellent electrical insulation properties (dielectric constant 9.4, dielectric loss 0.001). These products are particularly suitable for electrostatic chucks and wafer handling components in semiconductor manufacturing, bipolar plates for fuel cells in new energy vehicles, as well as measurement platforms in precision instruments and structural components in high-temperature environments, significantly enhancing equipment reliability, precision, and service life.
Silicon Nitride Sheet Specification
| Material | Si3N4 |
| Size | 100×100×0.5mm 130×190×0.5mm 20×20×5mm Or customized according to specific requirements. |
Silicon Nitride Plate/Sheet/Disc Features
- Superior Mechanical Properties: Combines high hardness (Vickers hardness 1400-1600) with excellent fracture toughness, flexural strength exceeding 800MPa, and outstanding wear resistance.
- Exceptional Thermal Performance: Withstands temperatures up to 1200°C, thermal conductivity 15-30W/(m·K), low thermal expansion coefficient of 3.2×10⁻⁶/K, and excellent thermal shock resistance.
- Stable Chemical Characteristics: Highly corrosion-resistant against most acids, alkalis, and molten metals, maintaining chemical inertness even at elevated temperatures.
- Precision Machining Quality: Achieves flatness within ±0.005mm and surface roughness Ra≤0.4μm after precision grinding, enabling tight dimensional control.
- Excellent Electrical Properties: Stable high-temperature insulation, dielectric constant 9.4, low dielectric loss 0.001, and strong plasma erosion resistance.
- Lightweight Design: Density of only 3.2-3.3g/cm³, over 60% lighter than conventional metallic materials, facilitating equipment weight reduction and efficiency improvement.
Silicon Nitride Plate/Sheet/Disc Applications
- Semiconductor & Solar Manufacturing – Used in wafer handling and photovoltaic production components.
- New Energy Systems – Applied in fuel cell stacks and power electronics insulation.
- Precision Equipment – Serves as base platforms in measurement and automation systems.
- High-Temperature Processing – Employed in industrial furnaces and glass production lines.
- Aerospace & Research – Used in spacecraft components and scientific facility parts.
Silicon Nitride Ceramic Packaging
Silicon nitride ceramic products are typically packaged in vacuum-sealed bags to prevent moisture or contamination and wrapped with foam to cushion vibrations and impacts during transport, ensuring the quality of products in their original condition.
Download
- SAFETY DATA SHEET (SDS) -Silicon Nitride Plate/Sheet/Disc
FAQ
What are the key properties of silicon nitride plates?
Silicon nitride plates feature high hardness, excellent thermal shock resistance, outstanding high-temperature stability (up to 1200°C), good wear resistance, chemical inertness, low density, and superior electrical insulation.
How does silicon nitride differ from alumina ceramic plates?
Silicon nitride offers significantly better toughness, thermal shock resistance, and high-temperature strength compared to alumina, making it ideal for applications with severe thermal or mechanical shock requirements.
What precision levels can be achieved in machining?
Through precision grinding, silicon nitride plates can achieve flatness within ±0.005mm and surface roughness of Ra≤0.4μm, meeting high-precision industrial requirements.
Is this material electrically conductive?
No, silicon nitride is an excellent electrical insulator and maintains stable insulation properties even at high temperatures, with low dielectric loss.
What should be considered during installation and use?
Avoid concentrated mechanical impact, ensure uniform heating in high-temperature applications, and use specialized ceramic adhesives for bonding.
Get A Quote
Request a personalized quote tailored to your specific requirements.